Method for fabricating capacitor array preventing crosstalk between adjacent capacitors in semiconductor device

ABSTRACT

A capacitor array of a semiconductor device including a plurality of capacitors is provided. The capacitor array includes a plurality of lower electrodes, which are formed over a semiconductor substrate. A dielectric layer formed over the lower electrodes, and an upper electrode formed over the dielectric layer. The plurality of lower electrodes are insulated from each other either by an insulating layer having pores of a low dielectric constant, or by an air gap.

GROSS REFERENCE TO RELATED APPLICATIONS

This is a divisional application of application Ser. No. 09/669,964,filed 26 Sep. 2000, which is hereby incorporated by reference in itsentirety for all purposes.

BACKGROUND OF THE INVENTION

The present invention relates to a capacitor array of a semiconductordevice having a plurality of capacitors and a method for fabricating thecapacitor array. More particularly, the present invention relates to acapacitor array for preventing the crosstalk between adjacent capacitorsin a semiconductor device and a method for fabricating the capacitorarray.

As semiconductor devices have recently become more highly integrated,spacing between unit parts in semiconductor devices has greatlydecreased. For example, a plurality of transistors and capacitors areincluded in a semiconductor memory device such as a dynamic randomaccess memory (DRAM).

As the integration of the semiconductor memory device increases, spacingbetween the capacitors as well as between the gates of the transistorsgreatly decreases. This may cause various problems during operation, aswell as during the fabrication of the semiconductor memory devices. Forexample, a decrease of the spacing between capacitors may disturbcomplete insulation between adjacent capacitors.

Moreover, crosstalk may sometimes occur between adjacent capacitors sothat information cannot be accurately stored. Such crosstalk betweenadjacent capacitors greatly decreases the reliability of devices.

SUMMARY OF THE INVENTION

It is an objective of the present invention to provide a capacitor arrayincluding a plurality of capacitors that prevents crosstalk betweenadjacent capacitors during the operation of the device.

It is another objective of the present invention to provide a method forfabricating such a capacitor array.

To achieve the first objective, a capacitor array of a semiconductordevice having a plurality of capacitors is provided. The capacitor arraycomprises a plurality of lower electrodes formed over a semiconductorsubstrate; one or more insulating layers formed between the adjacentlower electrodes, the insulating layers having pores of a low dielectricconstant; a dielectric-layer formed over the lower electrodes; and anupper electrode formed over the dielectric layer. The lower electrodespreferably each have a cylindrical shape. The insulating layerspreferably comprise amorphous carbon, polyimide, or hybridsilicate-on-glass.

Alternately, a capacitor array of a semiconductor device having aplurality of capacitors may be provided. The capacitor array comprises aplurality of lower electrodes formed over a semiconductor substrate; oneor more air gaps formed between the adjacent lower electrodes; adielectric layer formed over the lower electrodes; and an upperelectrode formed over the dielectric layer. The lower electrodespreferably each have a cylindrical shape.

To achieve the second objective, a method is provided for fabricating acapacitor array of a semiconductor device having a plurality ofcapacitors. The method comprises forming an insulating layer having alow dielectric constant over a semiconductor substrate; forming anetching stop layer over the insulating layer; forming a plurality ofopenings that expose a top surface of the semiconductor substrate atpredetermined intervals by patterning the insulating layer and theetching stop layer; forming a lower electrode conductive layer over theetching stop layer and in the plurality of openings; removing a part ofthe lower electrode conductive layer to expose a surface of the etchingstop layer, thereby forming a plurality of lower electrodes that areinsulated from each other by the insulating layer; forming one or moreair gaps between the plurality of lower electrodes by performing a heattreatment process at a predetermined temperature to remove theinsulating layer from between the plurality of lower electrodes; forminga dielectric layer over the lower electrodes; and forming an upperelectrode over the dielectric layer.

The insulating layer preferably comprises material that is completelythermally-decomposed at a temperature of 400° C. or less. Morespecifically, the insulating layer preferably comprises amorphouscarbon, polyimide, or hybrid silicate-on-glass. The etching stop layerpreferably comprises a Si₃N₄ layer or a SiON layer. The lower electrodesare preferably each formed to have a cylindrical shape.

The method may further comprise forming a protective layer over thelower electrode conductive layer, within the openings, before removing apart of the lower electrode conductive layer; and removing theprotective layer after forming the lower electrodes.

The protective layer is preferably formed by deposition of an oxidelayer using a chemical vapor deposition method or a spin-on-glassmethod. The protective layer is preferably removed by a wet etchingmethod. The removing of a part of the lower electrode conductive layeris preferably accomplished using a chemical-mechanical polishing processor an etch back process.

An alternate method for fabricating a capacitor array of a semiconductordevice having a plurality of capacitors may also be provided. The methodcomprises forming an insulating layer having a low dielectric constantover a semiconductor substrate; forming an etching stop layer over theinsulating layer; forming a plurality of openings that expose a topsurface of the semiconductor substrate at predetermined intervals bypatterning the insulating layer and the etching stop layer; forming alower electrode conductive layer over the etching stop layer and in theopenings; removing a part of the lower electrode conductive layer toexpose a top surface of the etching stop layer, thereby forming lowerelectrodes that are insulated from each other by the insulating layer;forming pores in the insulating layer by performing a heat treatmentprocess at a predetermined temperature; forming a dielectric layer overthe lower electrodes; and forming an upper electrode over the dielectriclayer.

The insulating layer preferably comprises a material that is partiallythermally-decomposed at a temperature of 400° C. or less. Morespecifically, the insulating layer preferably comprises amorphouscarbon, polyimide, or hybrid silicate-on-glass. The etching stop layerpreferably comprises a Si₃N₄ layer or a SiON layer. The lower electrodesare preferably each formed to have a cylindrical shape.

The method may further comprise forming a protective layer over thelower electrode conductive layer within the openings before removing apart of the lower electrode conductive layer; and removing theprotective layer after forming the lower electrodes.

The protective layer is preferably formed by the deposition of an oxidelayer using a chemical vapor deposition method or a spin-on-glassmethod. The protective layer is preferably removed by a wet etchingmethod. The removing of a part of the lower electrode conductive layeris preferably accomplished by using a chemical-mechanical polishingprocess or an etch back process.

BRIEF DESCRIPTION OF THE DRAWINGS

The above objectives and advantages of the present invention will becomemore apparent by describing in detail preferred embodiments thereof withreference to the attached drawings in which:

FIG. 1 is a sectional view showing a capacitor array of a semiconductordevice according to a first preferred embodiment of the presentinvention;

FIG. 2 is a sectional view showing a capacitor array of a semiconductordevice according to a second preferred embodiment of the presentinvention; and

FIGS. 3 through 9 are sectional views for explaining a method forfabricating a capacitor array of a semiconductor device according to thepreferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

The present invention will now be described in greater detail withreference to the accompanying drawings, in which preferred embodimentsof the invention are shown. This invention may, however, be embodied inmany different forms and should not be construed as being limited to theembodiments set forth herein. Rather, these embodiments are provided sothat this disclosure will be thorough and complete, and will fullyconvey the concept of the invention to those skilled in the art.

FIG. 1 is a sectional view showing a capacitor array of a semiconductordevice according to a first preferred embodiment of the presentinvention. Referring to FIG. 1, in this embodiment, a plurality ofcapacitors are formed over a semiconductor substrate 100. Although onlyfour capacitors are shown in this drawing, more capacitors may be formedin practice.

Each capacitor includes a lower electrode 110, a dielectric layer 120,and an upper electrode 130. A plurality of lower electrodes 110 areindividually formed for the individual capacitors. However, thedielectric layer 120 and the upper electrode 130 are preferably commonto all of the capacitors. Preferably, each of the lower electrodes 110is formed to have a cylindrical shape.

In addition, in the first preferred embodiment adjacent lower electrodes110 are preferably insulated from each other by an air gap 141. The airgap 141, which is an empty space in which only air exist, is defined bythe top surface of the substrate 100, the outer sidewalls of the lowerelectrodes 110 and the bottom surface of an etching stop layer 150. Asis well known, air has a very low dielectric constant so that thecapacitors can each be completely insulated from adjacent capacitors bythe air gaps 141. Accordingly, this can eliminate crosstalk betweenadjacent capacitors during the operation of devices, and thereby enhancethe reliability of such devices.

FIG. 2 is a sectional view showing a capacitor array of a semiconductordevice according to a second preferred embodiment of the presentinvention. The same reference numerals in FIGS. 1 and 2 represent thesame elements, and thus their description will not be repeated.

Referring to FIG. 2, each lower electrode 110 is insulated from anadjacent lower electrode 110 by an insulating layer 142. The air gap 141previously described in FIG. 1 is most effective in suppressing thecrosstalk between adjacent capacitors, but it does not have thesupporting power of a solid material. As a result, in the firstpreferred embodiment, the upper electrode 130 may sink into the air gap141.

However, in the second preferred embodiment, an insulating layer 142having a low dielectric constant is used to insulate adjacentcapacitors. This maintains the stability of the device as well assuppressing crosstalk between adjacent capacitors. The low dielectricconstant insulating layer 142 is preferably formed of amorphous carbon,polyimide, or hybrid silicate-on-glass (SOG).

Sometimes, however, the suppression of crosstalk is more important thanthe stability of a device. In this case, a porous insulating layer canbe used as the low dielectric constant insulating layer 142. In thiscase, pores, which have a very low dielectric constant, are formed inthe insulating layer 142, thereby achieving better insulation betweenadjacent capacitors.

FIGS. 3 through 9 are sectional views for explaining a method forfabricating a capacitor array of a semiconductor device according topreferred embodiments of the present invention. Although FIGS. 3 through9 show a method for fabricating a capacitor array in which adjacentcapacitors are insulated by an air gap, it is obvious that the samefabrication method could also be applied when an insulating layer havinga low dielectric constant or an insulating layer having pores and a lowdielectric constant is used instead of an air gap.

Referring to FIG. 3, an insulating layer 210 having a low dielectricconstant is formed over a semiconductor substrate 200. The insulatinglayer 210 is preferably formed of material that can be completelydecomposed and removed at a certain temperature, for example, at atemperature of 400° C. or less. Any material, such as amorphous carbon,polyimide, or hybrid SOG, which is formed by a chemical vapor depositionmethod or a spin-on-glass method, can be used as the material that cancompletely be decomposed and removed at the temperature of 400° C. orless.

Subsequently, an etching stop layer 220 is formed over the insulatinglayer 210. The etching stop layer 220 serves as the end point of etchingduring a subsequent etching process and is preferably formed of Si₃N₄ orSiON. Thereafter, a photoresist layer is deposited over the etching stoplayer 220. Exposure and development are then performed by a typicallithography method, thereby forming a photoresist layer pattern 230. Thephotoresist layer pattern 230 has openings exposing the surface of theetching stop layer 220 at predetermined intervals.

Referring to FIG. 4, exposed portions of the etching stop layer 220 andthe insulating layer 210 are removed by performing an etching processusing the photoresist layer pattern 230 as an etching mask, therebyforming openings, which expose the surface of the semiconductorsubstrate 200 at predetermined intervals. After forming the openings,the photoresist layer pattern 230 is then removed.

Referring to FIG. 5, a conductive layer that will form the lowerelectrodes, for example, a polysilicon layer 240, is formed over theentire surface of the resultant stricture of FIG. 4. The polysiliconlayer 240 may be formed by a chemical vapor deposition method.

After forming the polysilicon layer 240, a protective layer 250 isformed over the entire surface of the resultant structure. Theprotective layer 250 is formed to protect the bottom A of thepolysilicon layer 240 from etching during the subsequent process ofremoving the polysilicon layer 240. The protective layer 250 ispreferably formed of an oxide. The protective layer 250 may be formed bya chemical vapor deposition method or a spin-on-glass method.

Referring to FIG. 6, a chemical-mechanical polishing process or an etchback process is performed to remove portions of the protective layer 250and the polysilicon layer 240 of FIG. 5. The chemical-mechanicalpolishing process or the etch back process is preferably performed untilthe surface of the etching stop layer 220 is exposed. As a result ofthis, portions of the polysilicon layer 240 formed above the etchingstop layer 220 are removed, thereby forming lower electrodes 240′, whichare separated from each other by portions of the insulating layer 210and the etching stop layer 220. Subsequently, to remove the etching stoplayer 220 and the insulating layer 210 in a peripheral circuit area, aphotoresist layer pattern 260 is formed that exposes the peripheralcircuit area.

Referring to FIG. 7, the etching stop layer 220 and the insulating layer210 in the peripheral circuit area are removed by performing an etchingprocess using the photoresist layer pattern 260 of FIG. 6 as an etchingmask. As a result of this, the surface of the semiconductor substrate200 is exposed in the peripheral circuit area.

Subsequently, the photoresist layer pattern 260 is removed. Afterremoving the photoresist layer pattern 260, a heat treatment process isperformed at a predetermined temperature, for example, a temperature of400° C. or less. The heat treatment process is performed until remainingportions of the insulating layer 210 are completely removed. Thus, theinsulating layer 210 is thermally decomposed and discharged in the formof a gas, thereby forming air gaps 270 that replace the insulating layer210.

In alternate embodiments, the insulating layer 210 can be retainedbetween the electrodes 240′. In addition, when the insulating layer 210is formed of a material that can be partially decomposed at atemperature of 400° C. or less, an insulating layer having pores isformed instead of the air gaps 270 as the result of performing the heattreatment process.

Referring to FIG. 8, the protective layer 250 of FIG. 7 is removed,preferably by a wet etching method, thereby completing a lower electrode240′ having a cylindrical shape. Subsequently, a dielectric layer 280 isdeposited over the entire surface of the resultant structure, and anupper electrode conductive layer 290 is then deposited over thedielectric layer 280.

Then, a photoresist layer pattern 300 that exposes the peripheralcircuit area is formed over the upper electrode conductive layer 290.The upper electrode conductive layer 290 is then patterned by performingan etching process using the photoresist layer pattern 300 as an etchingmask. As a result of this etching, a capacitor array of a semiconductordevice according to preferred embodiments of the present invention iscompleted as shown in FIG. 9.

While this invention has been particularly shown and described withreference to preferred embodiments thereof, it will be understood bythose skilled in the art that various changes in form and details may bemade therein without departing from the spirit and scope of theinvention as defined by the appended claims. For example, the heattreatment process for forming the air gaps 270 of FIG. 7 may beperformed either before or after the protective layer 250 of FIG. 7 iscompletely removed as described above. Similarly, the heat treatmentprocess may be performed in another step.

In a capacitor array of a semiconductor device and a method forfabricating the capacitor array according to the present invention, thecapacitor array including a plurality of capacitors has an insulatinglayer having a low dielectric constant. For example, an insulating layerhaving pores or an air gap is formed between adjacent capacitors,thereby suppressing the crosstalk between these adjacent capacitors.This improves the reliability of devices.

1. A method for fabricating a capacitor array of a semiconductor devicehaving a plurality of capacitors, the method comprising: forming aninsulating layer having a low dielectric constant over a semiconductorsubstrate; forming an etching stop layer over the insulating layer;forming a plurality of openings that expose a top surface of thesemiconductor substrate at predetermined intervals by patterning theinsulating layer and the etching stop layer; forming a lower electrodeconductive layer over the etching stop layer and in the plurality ofopenings; removing a part of the lower electrode conductive layer toexpose a surface of the etching stop layer, thereby forming a pluralityof lower electrodes that are insulated from each other by the insulatinglayer; forming one or more air gaps between the plurality of lowerelectrodes by performing a heat treatment process at a predeterminedtemperature to remove the insulating layer from between the plurality oflower electrodes; forming a dielectric layer over the lower electrodes;and forming an upper electrode over the dielectric layer.
 2. A methodfor fabricating a capacitor array of a semiconductor device, as recitedin claim 1, wherein the insulating layer comprises material that iscompletely thermally-decomposed at a temperature of 400° C. or less. 3.A method for fabricating a capacitor array of a semiconductor device, asrecited in claim 2, wherein the insulating layer comprises amorphouscarbon, polyimide, or hybrid silicate-on-glass.
 4. A method forfabricating a capacitor array of a semiconductor device, as recited inclaim 1, wherein the etching stop layer comprises a Si₃N₄ layer or aSiON layer.
 5. A method for fabricating a capacitor array of asemiconductor device, as recited in claim 1, wherein the lowerelectrodes are each formed to have a cylindrical shape.
 6. A method forfabricating a capacitor array of a semiconductor device, as recited inclaim 1, further comprising: forming a protective layer over the lowerelectrode conductive layer, within the openings, before removing a partof the lower electrode conductive layer; and removing the protectivelayer after forming the lower electrodes.
 7. A method for fabricating acapacitor array of a semiconductor device, as recited in claim 6,wherein the protective layer is formed by deposition of an oxide layerusing a chemical vapor deposition method or a spin-on-glass method.
 8. Amethod for fabricating a capacitor array of a semiconductor device, asrecited in claim 6, wherein the protective layer is removed by a wetetching method.
 9. A method for fabricating a capacitor array of asemiconductor device, as recited in claim 1, wherein removing a part ofthe lower electrode conductive layer is accomplished using achemical-mechanical polishing process or an etch back process.
 10. Amethod for fabricating a capacitor array of a semiconductor devicehaving a plurality of capacitors, the method comprising: forming aninsulating layer having a low dielectric constant over a semiconductorsubstrate; forming an etching stop layer over the insulating layer;forming a plurality of openings that expose a top surface of thesemiconductor substrate at predetermined intervals by patterning theinsulating layer and the etching stop layer; forming a lower electrodeconductive layer over the etching stop layer and in the openings;removing a part of the lower electrode conductive layer to expose a topsurface of the etching stop layer, thereby forming lower electrodes thatare insulated from each other by the insulating layer; forming pores inthe insulating layer by performing a heat treatment process at apredetermined temperature; forming a dielectric layer over the lowerelectrodes; and forming an upper electrode over the dielectric layer.11. A method for fabricating a capacitor array of a semiconductordevice, as recited in claim 10, wherein the insulating layer comprises amaterial that is partially thermally-decomposed at a temperature of 400°C. or less.
 12. A method for fabricating a capacitor array of asemiconductor device, as recited in claim 11, wherein the insulatinglayer comprises amorphous carbon, polyimide, or hybridsilicate-on-glass.
 13. A method for fabricating a capacitor array of asemiconductor device, as recited in claim 10, wherein the etching stoplayer comprises a Si₃N₄ layer or a SiON layer.
 14. A method forfabricating a capacitor array of a semiconductor device, as recited inclaim 10, wherein the lower electrodes are each formed to have acylindrical shape.
 15. A method for fabricating a capacitor array of asemiconductor device, as recited in claim 10, further comprising:forming a protective layer over the lower electrode conductive layerwithin the openings before removing a part of the lower electrodeconductive layer; and removing the protective layer after forming thelower electrodes.
 16. A method for fabricating a capacitor array of asemiconductor device, as recited in claim 15, wherein the protectivelayer is formed by the deposition of an oxide layer using a chemicalvapor deposition method or a spin-on-glass method.
 17. A method forfabricating a capacitor array of a semiconductor device, as recited inclaim 15, wherein the protective layer is removed by a wet etchingmethod.
 18. A method for fabricating a capacitor array of asemiconductor device, as recited in claim 10, wherein removing a part ofthe lower electrode conductive layer is accomplished by using achemical-mechanical polishing process or an etch back process.